Fabrication of Functional Surfaces with Micromachining Processes
نویسندگان
چکیده
منابع مشابه
Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces
Silica glass is frequently used as a device material for micro/nano fluidic devices due to its excellent properties, such as transparency and chemical resistance. Wet etching by hydrofluoric acid and dry etching by neutral loop discharge (NLD) plasma etching are currently used to micromachine glass to form micro/nano fluidic channels. Electro-osmotic flow (EOF) is one of the most effective meth...
متن کاملFabrication of Saddle-Shaped Surfaces by Flame Forming Process
The flame forming process is widely used to manufacture ship hull plates. The saddle-shaped surfaces have different curvatures in perpendicular angles of planes and the manufacturers face an anti-clastic curvature. In this article, the manufacturing of saddle-shaped surfaces utilizing the flame forming process is investigated. The spiral irradiating scheme is used for forming. In order to study...
متن کاملFabrication of Polymeric Micro needle Array by Micromachining & Micro molding
Microneedles are expected to have greater demand in biomedical applications like sensing, electroporation & drug delivery in the future and there is need for development of fabrication process which is simple, economical and productive. Present work discusses about fabrication of PDMS (polydimethylsiloxane) micro needle array electrode for bio-potential signal measurement like EEG by micromachi...
متن کاملAn Investigation of Processes for Glass Micromachining
This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE), and glass reflow techniques. The advantages as well as disadvantages of each method are presented and discussed in light of the experiments. Sandblast and wet etching techniques are simple processes but face difficulties in small and high-aspect-ratio structures. A sandblasted 2...
متن کاملTool wear studies in fabrication of microchannels in ultrasonic micromachining.
Form accuracy of a machined component is one of the performance indicators of a machining process. Ultrasonic micromachining is one such process in which the form accuracy of the micromachined component significantly depends upon the form stability of tool. Unlike macromachining, a very small amount of tool wear in micromachining could lead to considerable changes in the form accuracy of the ma...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2007
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.73.1110